Granted Patent
Utility
US 6,760,144 · App. 10/309,800
Articulated MEMS electrostatic rotary actuator
Inventors:
Edward A. Hill, Ramaswamy Mahadevan, Vijayakumar R. Dhuler, Robert L. Wood
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Dec 4, 2002
Inventors
Edward A. Hill
Ramaswamy Mahadevan
Vijayakumar R. Dhuler
Robert L. Wood
Assignee (at issue)
JDS Uniphase Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.