Granted Patent
Utility
US 6,760,167 · App. 10/403,027
Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
Inventors:
Michael F. Meehan, David Taub, Daniel N. Galburt
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Apr 1, 2003
Inventors
Michael F. Meehan
David Taub
Daniel N. Galburt
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.