Granted Patent
Utility
US 6,760,640 · App. 10/099,622
Automated manufacturing system and method for processing photomasks
Inventors:
Edward J. Suttile, Charles Croke, James P. Morrison, Ryan T. Vo, Peter Frederico Jones, Mary R. Spano, Edward Arthur Mills
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Mar 14, 2002
Inventors
Edward J. Suttile
Charles Croke
James P. Morrison
Ryan T. Vo
Peter Frederico Jones
Mary R. Spano
Edward Arthur Mills
Assignee (at issue)
PHOTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.