Granted Patent
Utility
US 6,760,641 · App. 09/923,397
Discrete time trajectory planner for lithography system
Inventor:
Roberto B. Wiener
Patented Case
View Patent ↗
Granted: Jul 6, 2004
Filed: Aug 8, 2001
Inventor
Roberto B. Wiener
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.