Granted Patent
Utility
US 6,763,702 · App. 10/325,356
Method and apparatus for hermeticity determination and leak detection in semiconductor packaging
Inventors:
Allen Chien, Frank S. Geefay, Cheol HAN, Qing-Cao Gan
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Dec 19, 2002
Inventors
Allen Chien
Frank S. Geefay
Cheol HAN
Qing-Cao Gan
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.