Granted Patent
Utility
US 6,764,573 · App. 09/977,158
Wafer thinning techniques
Inventors:
Richard Lai, Harvey N. Rogers, Jr., Yaochung Chen, Michael E. Barsky
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Oct 11, 2001
Inventors
Richard Lai
Harvey N. Rogers, Jr.
Yaochung Chen
Michael E. Barsky
Assignee (at issue)
NORTHROP GRUMMAN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.