IP Library Granted Patent US 6,764,574
Granted Patent Utility
US 6,764,574 · App. 09/938,150

Polishing pad composition and method of use

Inventors: Yaw S. Obeng, Edward M. Yokley, Kathleen C. Richardson
Patented Case View Patent ↗
Granted: Jul 20, 2004 Filed: Aug 22, 2001
Inventors
Yaw S. Obeng
Edward M. Yokley
Kathleen C. Richardson
Assignee (at issue)
PsiloQuest

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Quick Facts
Patent No.
US 6,764,574
App. No.
09/938,150
Filed
2001-08-22
Granted
2004-07-20
Kind
B1