IP Library › Granted Patent US 6,764,895
Granted Patent Utility
US 6,764,895 · App. 10/158,978

Process for fabricating RuSixOy-containing adhesion layers

Inventors: Eugene P. Marsh, Brenda D. Kraus
Patented Case View Patent ↗
Granted: Jul 20, 2004 Filed: May 30, 2002
Inventors
Eugene P. Marsh
Brenda D. Kraus
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,764,895
App. No.
10/158,978
Filed
2002-05-30
Granted
2004-07-20
Kind
B2