Granted Patent
Utility
US 6,764,902 · App. 10/376,694
Method of manufacturing semiconductor device
Inventors:
Takashi Kobayashi, Atsuko Katayama
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Mar 3, 2003
Inventors
Takashi Kobayashi
Atsuko Katayama
Assignee (at issue)
Renesas Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.