Granted Patent
Utility
US 6,764,920 · App. 10/126,840
Method for reducing shallow trench isolation edge thinning on tunnel oxides using partial nitride strip and small bird's beak formation for high performance flash memory devices
Inventors:
Nian Yang, John Jianshi Wang, Unsoon Kim
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Apr 19, 2002
Inventors
Nian Yang
John Jianshi Wang
Unsoon Kim
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.