Granted Patent
Utility
US 6,765,280 · App. 09/217,740
Local oxidation of a sidewall sealed shallow trench for providing isolation between devices of a substrate
Inventors:
Min Cao, Paul J. Vande Voorde, Wayne M. Greene, Malahat Tavassoli
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Dec 21, 1998
Inventors
Min Cao
Paul J. Vande Voorde
Wayne M. Greene
Malahat Tavassoli
Assignee (at issue)
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.