Granted Patent
Utility
US 6,765,680 · App. 10/176,773
Methods of testing and manufacturing micro-electrical mechanical mirrors
Inventors:
Charles D. Carr, Zhencan (Frank) Fan, Lu Fang, Michael Hahn, Xiaoqing Yin
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Jun 21, 2002
Inventors
Charles D. Carr
Zhencan (Frank) Fan
Lu Fang
Michael Hahn
Xiaoqing Yin
Assignee (at issue)
Agere Systems Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.