Granted Patent
Utility
US 6,765,712 · App. 09/902,490
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Antonius Johannes Josephus Van Dijsseldonk, Erik Loopstra, Dominicus Jacobus Petrus Adrianus Franken
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Jul 11, 2001
Inventors
Antonius Johannes Josephus Van Dijsseldonk
Erik Loopstra
Dominicus Jacobus Petrus Adrianus Franken
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.