Granted Patent
Utility
US 6,765,946 · App. 10/029,319
Fan for gas discharge laser
Inventors:
William N. Partlo, Curtis Rettig
Patented Case
View Patent ↗
Granted: Jul 20, 2004
Filed: Oct 17, 2001
Inventors
William N. Partlo
Curtis Rettig
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.