Granted Patent
Utility
US 6,767,276 · App. 10/017,243
Holder for flat workpieces, particularly semiconductor wafers
Inventor:
Thomas Keller
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Dec 13, 2001
Inventor
Thomas Keller
Assignee (at issue)
Peter Wolters CMP-Systeme GmbH & Co. KG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.