Granted Patent
Utility
US 6,767,428 · App. 10/029,192
Method and apparatus for chemical mechanical planarization
Inventors:
Yehiel Gotkis, Aleksandar Owczarz, Rod Kistler
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Dec 20, 2001
Inventors
Yehiel Gotkis
Aleksandar Owczarz
Rod Kistler
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.