Granted Patent
Utility
US 6,767,476 · App. 10/419,659
Polishing composition for metal CMP
Inventors:
Shumin Wang, Steven Grumbine, Christopher C. Streinz, Eric W. G. Hoglund
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Apr 21, 2003
Inventors
Shumin Wang
Steven Grumbine
Christopher C. Streinz
Eric W. G. Hoglund
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.