Granted Patent
Utility
US 6,767,690 · App. 10/391,310
Methods of forming patterns across photoresist and methods of forming radiation-patterning tools
Inventor:
J. Brett Rolfson
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Mar 17, 2003
Inventor
J. Brett Rolfson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.