Granted Patent
Utility
US 6,767,752 · App. 10/212,146
Temperature control method and semiconductor device manufacturing method
Inventors:
Minoru Nakano, Masaaki Ueno
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Aug 6, 2002
Inventors
Minoru Nakano
Masaaki Ueno
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.