Granted Patent
Utility
US 6,767,828 · App. 09/971,953
Method for forming patterns for semiconductor devices
Inventors:
Paul S. Andry, John C. Flake, Bruno Michel, Takatoshi Tsujimura
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Oct 5, 2001
Inventors
Paul S. Andry
John C. Flake
Bruno Michel
Takatoshi Tsujimura
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.