Granted Patent
Utility
US 6,767,841 · App. 09/764,634
Process for producing a semiconductor wafer
Inventors:
Gunter Schwab, Helmut Franke, Manfred Schofberger
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Jan 18, 2001
Inventors
Gunter Schwab
Helmut Franke
Manfred Schofberger
Assignee (at issue)
SILTRONIC AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.