Granted Patent
Utility
US 6,767,845 · App. 10/303,275
Method of manufacturing semiconductor device
Inventor:
Naoki Nakamura
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Nov 25, 2002
Inventor
Naoki Nakamura
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.