Granted Patent
Utility
US 6,767,848 · App. 10/241,180
Silicon semiconductor substrate and method for production thereof
Inventors:
Akiyoshi Tachikawa, Kazunori Ishisaka
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Sep 11, 2002
Inventors
Akiyoshi Tachikawa
Kazunori Ishisaka
Assignee (at issue)
Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.