Granted Patent
Utility
US 6,767,877 · App. 10/053,364
Method and system for chemical injection in silicon wafer processing
Inventors:
CHANG-WEI KUO, Ismail Kashkoush, Nick Yialamas, Gregory Skibinski
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Jan 18, 2002
Inventors
CHANG-WEI KUO
Ismail Kashkoush
Nick Yialamas
Gregory Skibinski
Assignee (at issue)
Akrion, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.