IP Library Granted Patent US 6,768,102
Granted Patent Utility
US 6,768,102 · App. 09/594,169

Method and system for recalibration during micro-imaging to determine thermal drift

Inventor: David F. Skoll
Patented Case View Patent ↗
Granted: Jul 27, 2004 Filed: Jun 15, 2000
Inventor
David F. Skoll
Assignee (at issue)
CHIPWORKS INCORPORATED

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Quick Facts
Patent No.
US 6,768,102
App. No.
09/594,169
Filed
2000-06-15
Granted
2004-07-27
Kind
B1