Granted Patent
Utility
US 6,768,175 · App. 09/787,877
Semiconductor substrate and its production method, semiconductor device comprising the same and its production method
Inventors:
Takashi Morishita, Masahiro Matsui
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Mar 23, 2001
Inventors
Takashi Morishita
Masahiro Matsui
Assignee (at issue)
ASAHI KASEI KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.