Granted Patent
Utility
US 6,768,200 · App. 10/174,749
Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device
Inventors:
Alfred Grill, Vishnubhai V. Patel
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Jun 19, 2002
Inventors
Alfred Grill
Vishnubhai V. Patel
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.