Granted Patent
Utility
US 6,768,567 · App. 10/163,479
Synchrotron-based EUV lithography illuminator simulator
Inventor:
Patrick P. Naulleau
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Jun 5, 2002
Inventor
Patrick P. Naulleau
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.