Granted Patent
Utility
US 6,768,628 · App. 09/842,975
Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
Inventors:
Richard D. Harris, Michael J. Knieser, Robert J. Kretschmann, Mark A. Lucak
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Apr 26, 2001
Inventors
Richard D. Harris
Michael J. Knieser
Robert J. Kretschmann
Mark A. Lucak
Assignee (at issue)
Rockwell Automation Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.