Granted Patent
Utility
US 6,768,756 · App. 09/804,618
MEMS membrane with integral mirror/lens
Inventors:
Dale C. Flanders, Steven Nagle, Margaret B. Stern
Patented Case
View Patent ↗
Granted: Jul 27, 2004
Filed: Mar 12, 2001
Inventors
Dale C. Flanders
Steven Nagle
Margaret B. Stern
Assignee (at issue)
Axsun Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.