Granted Patent
Utility
US 6,769,616 · App. 10/302,387
Bidirectional MEMS scanning mirror with tunable natural frequency
Inventors:
Yee-Chung Fu, Ting-Tung Kuo
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Nov 22, 2002
Inventors
Yee-Chung Fu
Ting-Tung Kuo
Assignee (at issue)
Advanced Nano Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.