Granted Patent
Utility
US 6,770,146 · App. 09/776,241
Method and system for rotating a semiconductor wafer in processing chambers
Inventors:
Zion Koren, Yorkman Ma, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Lois Gayle Wride, Craig McFarland, Shawn Gibson
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 2, 2001
Inventors
Zion Koren
Yorkman Ma
Rudy Santo Tomas Cardema
James Tsuneo Taoka
Lois Gayle Wride
Craig McFarland
Shawn Gibson
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.