Granted Patent
Utility
US 6,770,526 · App. 10/294,100
Silicon nitride island formation for increased capacitance
Inventors:
Michael P. Chudzik, Jochen Beintner, Joseph F. Shepard, Jr.
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Nov 14, 2002
Inventors
Michael P. Chudzik
Jochen Beintner
Joseph F. Shepard, Jr.
Assignees (at issue)
Infineon Technologies North America Corp.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.