Granted Patent
Utility
US 6,770,528 · App. 10/367,737
Method of forming a data-storing capacitive element made in an insulating film on a semiconductor substrate
Inventors:
Ryouichi Furukawa, Kazuyuki Suko, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto, Tadanori Yoshida, Masayuki Ishizaka, Maki Shimoda
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 19, 2003
Inventors
Ryouichi Furukawa
Kazuyuki Suko
Masayuki Hiranuma
Koichi Saitoh
Hirohiko Yamamoto
Tadanori Yoshida
Masayuki Ishizaka
Maki Shimoda
Assignees (at issue)
Hitachi Ulsi Systems Co., Ltd.
Renesas Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.