Granted Patent
Utility
US 6,770,533 · App. 10/083,611
Method of manufacturing semiconductor device, nonvolatile semiconductor memory device and method of manufacturing the same
Inventors:
Yoshiaki Hisamune, Hidetoshi Nakata
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 27, 2002
Inventors
Yoshiaki Hisamune
Hidetoshi Nakata
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.