Granted Patent
Utility
US 6,770,541 · App. 10/371,416
Method for hard mask removal for deep trench isolation and related structure
Inventors:
Kevin Q. Yin, Amol Kalburge
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 20, 2003
Inventors
Kevin Q. Yin
Amol Kalburge
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.