Granted Patent
Utility
US 6,770,573 · App. 10/340,000
Method for fabricating an ultralow dielectric constant material
Inventors:
Alfred Grill, Vishnubhai V. Patel
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Jan 10, 2003
Inventors
Alfred Grill
Vishnubhai V. Patel
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.