Granted Patent
Utility
US 6,770,874 · App. 09/905,536
Gas cluster ion beam size diagnostics and workpiece processing
Inventor:
Jerald P. Dykstra
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Jul 13, 2001
Inventor
Jerald P. Dykstra
Assignee (at issue)
Epion Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.