Granted Patent
Utility
US 6,770,896 · App. 10/357,173
Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma
Inventor:
Guido Schriever
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Feb 3, 2003
Inventor
Guido Schriever
Assignee (at issue)
XTREME technologies GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.