IP Library Granted Patent US 6,771,081
Granted Patent Utility
US 6,771,081 · App. 10/227,141

Liquid-medium immersed MEMs devices

Inventors: Robert L. Borwick, III, Philip A. Stupar, Jeffrey F. DeNatale
Patented Case View Patent ↗
Granted: Aug 3, 2004 Filed: Aug 22, 2002
Inventors
Robert L. Borwick, III
Philip A. Stupar
Jeffrey F. DeNatale
Assignee (at issue)
Rockwell Scientific Licensing LLC

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Quick Facts
Patent No.
US 6,771,081
App. No.
10/227,141
Filed
2002-08-22
Granted
2004-08-03
Kind
B2