Granted Patent
Utility
US 6,771,482 · App. 10/163,567
Perimeter seal for backside cooling of substrates
Inventor:
Mark D. Kenney
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Jun 6, 2002
Inventor
Mark D. Kenney
Assignee (at issue)
Unaxis USA Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.