Granted Patent
Utility
US 6,771,895 · App. 09/226,396
Heating device for heating semiconductor wafers in thermal processing chambers
Inventors:
Arnon Gat, Bob Bogart
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Jan 6, 1999
Inventors
Arnon Gat
Bob Bogart
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.