Granted Patent
Utility
US 6,772,084 · App. 10/066,555
Overlay measurements using periodic gratings
Inventors:
Joerg Bischoff, Xinhui Niu, Nickhil Jakatdar
Patented Case
View Patent ↗
Granted: Aug 3, 2004
Filed: Jan 31, 2002
Inventors
Joerg Bischoff
Xinhui Niu
Nickhil Jakatdar
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.