Granted Patent
Utility
US 6,772,776 · App. 09/956,543
Apparatus for in situ cleaning of carbon contaminated surfaces
Inventors:
Leonard E. Klebanoff, Philip Grunow, Samuel Graham, Jr.
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Sep 18, 2001
Inventors
Leonard E. Klebanoff
Philip Grunow
Samuel Graham, Jr.
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.