Granted Patent
Utility
US 6,773,506 · App. 10/162,728
Method for producing thin film
Inventors:
Naoki Nakamura, Naomi Fukumaki, Takayuki Abe
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Jun 4, 2002
Inventors
Naoki Nakamura
Naomi Fukumaki
Takayuki Abe
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.