Granted Patent
Utility
US 6,774,035 · App. 09/942,201
Thermal processing of metal alloys for an improved CMP process in integrated circuit fabrication
Inventors:
Paul A. Farrar, John H. Givens
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Aug 29, 2001
Inventors
Paul A. Farrar
John H. Givens
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.