Granted Patent
Utility
US 6,774,046 · App. 09/880,584
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer
Inventors:
Stephen P. DeOrnellas, Alferd Cofer, Leslie G. Jerde, Kurt A. Olson, Paritosh Rajora
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Jun 13, 2001
Inventors
Stephen P. DeOrnellas
Alferd Cofer
Leslie G. Jerde
Kurt A. Olson
Paritosh Rajora
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.