Granted Patent
Utility
US 6,774,418 · App. 10/303,779
Low dielectric silicon oxynitride spacer films and devices incorporating such films
Inventor:
John T. Moore
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Nov 25, 2002
Inventor
John T. Moore
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.