IP Library Granted Patent US 6,774,533
Granted Patent Utility
US 6,774,533 · App. 10/221,151

Electrostatic impact driving microactuator

Inventors: Hiroyuki Fujita, Dai Kobayashi, Makoto Mita, Shouichi Tensaka
Patented Case View Patent ↗
Granted: Aug 10, 2004 Filed: Sep 13, 2002
Inventors
Hiroyuki Fujita
Dai Kobayashi
Makoto Mita
Shouichi Tensaka
Assignee (at issue)
Japan Science and Technology Agency

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Quick Facts
Patent No.
US 6,774,533
App. No.
10/221,151
Filed
2002-09-13
Granted
2004-08-10
Kind
B2