Granted Patent
Utility
US 6,775,015 · App. 10/175,207
Optical metrology of single features
Inventors:
Joerg Bischoff, Xinhui Niu, Junwei Bao
Patented Case
View Patent ↗
Granted: Aug 10, 2004
Filed: Jun 18, 2002
Inventors
Joerg Bischoff
Xinhui Niu
Junwei Bao
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.